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Professional Course

Micro and Nanofabrication (MEMS)

edX, Online
Length
7 weeks
Price
199 USD
Next course start
Start anytime See details
Delivery
Self-paced Online
Length
7 weeks
Price
199 USD
Next course start
Start anytime See details
Delivery
Self-paced Online
Visit this course's homepage on the provider's site to learn more or book!

Course description

Micro and Nanofabrication (MEMS)

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.

Upcoming start dates

1 start date available

Start anytime

  • Self-paced Online
  • Online
  • English

Who should attend?

Prerequisites:

Basics in Physics and Chemistry

Training content

  • MEMS and cleanroom introduction
  • Chemical vapor deposition (CVD)
  • Physical vapor deposition (PVD)
  • Lithography
  • Dry etching
  • Wet etching
  • Inspection and metrology

Course delivery details

This course is offered through Swiss Federal Institute of Technology Lausanne, a partner institute of EdX.

3-5 hours per week

Costs

  • Verified Track -$199
  • Audit Track - Free

Certification / Credits

What you'll learn

  • How to select the correct fabrication process for a specific micro-device or microsystem
  • Establish the workflow for the cleanroom processes
  • Identify how physical and chemical phenomena govern miniaturized systems for various applications
  • Resource planning for a given microsystem fabrication

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